Fortrend SMIF Arms

Fortrend SMIF Arms are automated handling systems designed for semiconductor wafer and reticle transfer. The range includes solutions for 150 mm and 200 mm applications, with different arm configurations available for integration with process equipment.

The range includes Wafer SMIF, Reticle SMIF and Customized SMIF systems. Wafer SMIF configurations include standard and rotating models, while customised options include compact, SD, EUV and specialised equipment configurations.

The PLUS 150 and PLUS 500 SMIF Arms provide precise cassette handling with features such as wafer mapping, wafer protrusion detection, SMIF pod sensors and different tool interface options. Selected models support arm payloads up to 3.2 kg, with heavy-load configurations available up to 7.5 kg.

Different configurations are available for straight movement, rotation, tilting, compact installation and OHT integration. Communication options include RS-232, SECS and parallel I/O, with E84 communication available on selected models.