Fortrend SMIF Load Ports

Fortrend SMIF Load Ports are designed for automated handling of SMIF pods and wafer cassettes in semiconductor equipment. The range includes load port solutions for 150 mm, 200 mm and 300 mm wafers, as well as frame-based applications.

The range includes PLM 150/200 series, PLM 200W, PLM 200UL, 300 mm Load Ports and Frame Load Ports. Options are available for manual loading, OHT integration and direct integration with process equipment.

Depending on the model, features include wafer mapping, wafer protrusion detection, pod presence sensing and SMIF pod identification. Selected models support active airflow for clean handling and communication through RS-232, SECS, Ethernet or E84 interfaces.

Fortrend also offers 300 mm and Frame Load Ports for automated wafer transfer between FOUPs and semiconductor equipment. These models provide wafer mapping and optional E84 communication for automated material handling systems.