Fortrend VTM

The Fortrend VTM is a vacuum transfer system designed for automated wafer handling in semiconductor process equipment. It provides controlled wafer transfer between load locks and vacuum process chambers.

The VTM range includes 150–200 mm and 300 mm configurations. For 150–200 mm wafers, Fortrend offers quadrilateral, pentagonal, hexagonal, heptagonal and octagonal vacuum transfer platforms. The 300 mm range includes a pentagonal standard system and a dual-feed wafer transfer platform.

Fortrend VTM systems can be configured with different vacuum robots, load locks, transfer chambers and process chamber interfaces. EFEM or SMIF systems can also be integrated at the equipment front end.

The systems are designed for high-cleanliness wafer handling and can be customized for different semiconductor process equipment. Optional features include wafer storage, buffer functions, and directional, cooling or pre-heating modules.