Fortrend Wafer EFEM

The Fortrend Wafer EFEM is an automated front-end system designed for wafer handling and transfer in semiconductor equipment. It provides a controlled interface between wafer carriers and process tools.

The Wafer EFEM is available in 2-loadport, 3-loadport and 4-loadport configurations. Customised systems are also available for different semiconductor processes and equipment requirements.

Fortrend EFEM systems can integrate key modules such as load ports, wafer transfer robots, wafer pre-aligners, OCR and reversing mechanisms. These modules can be configured according to the required wafer handling process.

Customised EFEM solutions are available for applications including lithography, CMP and bonding, and frame wafer handling. The system can also be integrated with SMIF equipment and other front-end automation modules.