FHRD Series 4-Axis Humid Dual-Arm Manipulator
The FHRD Series extends humid-environment capability with a dual-arm structure, enabling faster wafer exchange in wet process tools while maintaining corrosion resistance and cleanliness.
The FHRD Series extends humid-environment capability with a dual-arm structure, enabling faster wafer exchange in wet process tools while maintaining corrosion resistance and cleanliness.
