Fortrend FWRS Series 3-Axis Single-Arm Robot
The Fortrend FWRS Series is a 3-axis single-arm wafer transfer robot built for high-speed handling in ultra-clean semiconductor environments. A closed-loop servo control system keeps positioning accurate and repeatable across every transfer cycle.
It supports multiple wafer holding methods including vacuum suction, clamping, and Bernoulli types, giving you flexibility to match the robot to your process requirements. The FWRS is compatible with a wide range of semiconductor equipment including EFEM, sorters, coating and developing equipment, cleaning equipment, and inspection tools.
