Fortrend FWRD-ZD Series 5-Axis Dual-Z Robot

The Fortrend FWRD-ZD Series is a 5-axis dual-Z wafer transfer robot designed for semiconductor equipment requiring a large vertical travel range. Its dual Z-axis lifting structure lets the robot move up and down quickly across a wide height span, making it well suited for tall equipment stacks and multi-loadport setups.

The dual-arm configuration supports high-speed wafer transfer, and the robot works with a range of fork types to suit different handling requirements. Wafer holding options include vacuum suction, clamping, clamping and lifting, contact Bernoulli, and non-contact Bernoulli methods. The robot can also be mounted from the top or bottom depending on your equipment layout. An optional track axis can be added for multi-loadport wafer transfer applications across longer distances.

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