Fortrend FMRS Series 3-Axis MASK Single-Arm Manipulator
The Fortrend FMRS Series is a 3-axis single-arm manipulator built for photomask handling in lithography processes. It transfers MASK wafers and square glass plates precisely and stably under strict cleanliness requirements.
Its closed-loop control system ensures accurate and repeatable positioning with every transfer. Compatible with various fork types, it can be adapted to different mask sizes and equipment configurations. A practical choice for lithography setups where a straightforward single-arm solution is sufficient.
