Fortrend FMRS Series 3-Axis MASK Single-Arm Manipulator

The Fortrend FMRS Series is a 3-axis single-arm manipulator built for photomask handling in lithography processes. It transfers MASK wafers and square glass plates precisely and stably under strict cleanliness requirements.

Its closed-loop control system ensures accurate and repeatable positioning with every transfer. Compatible with various fork types, it can be adapted to different mask sizes and equipment configurations. A practical choice for lithography setups where a straightforward single-arm solution is sufficient.

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