Wafer Aligner

Fortrend Wafer Aligners are compact, high-precision pre-alignment systems designed to center wafers and detect flats or notches before processing. The integrated controller and real-time monitoring enable fast, accurate alignment for a wide range of wafer sizes.

Key highlights
– 4-axis (X, Y, Z, θ) control
– Wafer centering accuracy ≤ ±0.1 mm
– Edge-seeking time ≤ 7 seconds
– Supports 100–300 mm wafers