Fortrend FWRS Series 4-Axis Single-Arm Rotary Robot

The Fortrend FWRS Series 4-Axis Single-Arm Rotary Robot adds end-effector rotation to the standard 3-axis FWRS configuration. The end effector can rotate from 0 to 180 degrees, letting the robot change wafer orientation during transfer without a separate flip station.

This makes it a good fit for processes where wafers need to be reoriented or flipped mid-transfer. Like the rest of the FWRS range, it uses a closed-loop servo control system for accurate and repeatable positioning, and works with a range of wafer holding methods to suit different process requirements.