FWRD-ZD Series 5-Axis Dual-Z Robot
The FWRD-ZD Series uses a dual Z-axis lifting structure to support large vertical travel ranges. It can be combined with optional track axes for multi-loadport wafer transfer applications.
The FWRD-ZD Series uses a dual Z-axis lifting structure to support large vertical travel ranges. It can be combined with optional track axes for multi-loadport wafer transfer applications.