Fortrend Wafer Handling Robot

The Fortrend Wafer Handling Robot is designed for automated wafer transfer in semiconductor equipment. The series includes 3-axis, 4-axis, 5-axis and 6-axis configurations for different wafer handling requirements.

The robot series supports 2-inch to 12-inch wafers, with single-arm and dual-arm options. Different end-effectors are available, including vacuum suction, clamping, lifting and Bernoulli types.

Depending on the model, the robots provide ±0.1 mm repeatability and cleanliness up to ISO Class 1. Communication options include Ethernet and RS-232 with HEX and ASCII protocols.

Fortrend also offers specialized robots for mask wafers, PLP substrates and wet process environments. Options include wafer flipping, dual-Z movement, track axes and customized arm configurations.