Hyulim Robot Wafer Transfer Robot
The Hyulim Robot Wafer Transfer Robot is designed for automated wafer handling in semiconductor manufacturing environments, with dedicated Vacuum and Atmospheric configurations.
The Vacuum Type features a dual-arm design with 4 moving axes, supports wafer sizes up to approximately 300 mm, and has a payload of 700 g including the hand. The Atmospheric Type is available in single- and dual-arm configurations with 3- or 4-axis movement, supporting wafer sizes up to approximately 300 mm and payloads of up to 3 kg including the hand, depending on the model.
