Koganei FSU Series Multi-Channel Flow Rate Sensor Controller

The Koganei FSU Series is a multi-channel flow rate sensor controller built to detect workpiece suction in vacuum systems, particularly in applications where pressure sensors alone are not reliable enough. A single controller monitors up to four points at the same time, making it a practical fit for compact, high-density automation setups where accurate suction detection matters.

Three sensor head types are available to cover different flow rate ranges, and multiple window comparator output modes give you flexible control logic to match your system requirements. RS232C communication supports PC connectivity for easy parameter setting and monitoring. Because the unit is not affected by piping resistance, sensor heads can be mounted at different positions without affecting detection accuracy. Suitable for vacuum handling, inspection, and transport applications in both cleanroom and industrial automation environments.