Fortrend FWRS Series 3-Axis Single-Arm Robot

The FWRS Series is a 3-axis single-arm wafer transfer robot designed for high-speed material handling in ultra-clean environments. It employs a closed-loop servo control system and supports multiple wafer holding methods, including vacuum suction, clamping, and Bernoulli types.

Suitable for EFEM, sorters, coating & developing equipment, cleaning equipment, and inspection tools.