FMRS Series 3-Axis MASK Single-Arm Manipulator
The FMRS Series is a 3-axis single-arm manipulator for photomask handling in lithography processes. It provides precise and stable transfer of MASK wafers under stringent cleanliness requirements.
The FMRS Series is a 3-axis single-arm manipulator for photomask handling in lithography processes. It provides precise and stable transfer of MASK wafers under stringent cleanliness requirements.
